Title:
【発明の名称】放射率に無関係な温度測定をキャリブレーションする方法及び装置
Document Type and Number:
Japanese Patent JP2002521686
Kind Code:
A
Abstract:
A method and apparatus for calibrating temperature measurements that are taken with a first radiation detector for measuring thermal radiation given off by a reference substrate are provided. The method includes the steps of heating the reference substrate, which carries at least one reference material having a known melting point temperature, to or over the melting point temperature and measuring the thermal radiation of the reference substrate during the heating step, during a cooling period that follows the heating, or during both the heating and the cooling periods. The method also includes the step of correlating a measurement plateau of the thermal radiation which occurs during the measuring step with the known melting point temperature.
Inventors:
Wilfried Lerchi
Marx Hauf
Marx Hauf
Application Number:
JP2000562726A
Publication Date:
July 16, 2002
Filing Date:
July 28, 1999
Export Citation:
Assignee:
Steak Ertepe Systems Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
G01J5/10; G01J5/56; G01K15/00; (IPC1-7): G01J5/02; G01J5/10; G01J5/56; G01J5/62
Attorney, Agent or Firm:
Toshio Yano (4 outside)