Title:
A method for film deposition of a germanium*Sb*Te film
Document Type and Number:
Japanese Patent JP5913463
Kind Code:
B2
Inventors:
Yumiko Kono
Susumu Arima
Susumu Arima
Application Number:
JP2014145580A
Publication Date:
April 27, 2016
Filing Date:
July 16, 2014
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/18; C23C16/44
Domestic Patent References:
| JP2007258440A | ||||
| JP2008103731A | ||||
| JP2006225390A |
Attorney, Agent or Firm:
Hiroshi Takayama