Title:
成膜方法及びその成膜装置
Document Type and Number:
Japanese Patent JP5401960
Kind Code:
B2
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Inventors:
Amata Hideyuki
Yoshihiko Imanaka
Yoshihiko Imanaka
Application Number:
JP2008315569A
Publication Date:
January 29, 2014
Filing Date:
December 11, 2008
Export Citation:
Assignee:
FUJITSU, LTD.
International Classes:
C23C24/04; B05B7/14
Attorney, Agent or Firm:
Wood Tsunenori
Kenji Doi
Kenji Doi