Title:
抵抗による熱損失式圧力センサの動作方法
Document Type and Number:
Japanese Patent JP2008508517
Kind Code:
A
Abstract:
In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.
Inventors:
Borenstein Michael Dee
Arnold Paul Sea
Arnold Paul Sea
Application Number:
JP2007523626A
Publication Date:
March 21, 2008
Filing Date:
July 19, 2005
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
G01L21/12
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi