Title:
薄膜電子部品用基板の製造方法及びそれを用いた薄膜電子部品の製造方法
Document Type and Number:
Japanese Patent JP4872306
Kind Code:
B2
Inventors:
Yuki Miyamoto
Katsuhiko Hayashi
Katsuhiko Hayashi
Application Number:
JP2005312356A
Publication Date:
February 08, 2012
Filing Date:
October 27, 2005
Export Citation:
Assignee:
tdk Corporation
International Classes:
H05K1/16; C03C17/25; C04B41/87; H01G4/33
Domestic Patent References:
| JP2004356024A | ||||
| JP5129458A | ||||
| JP60127282A | ||||
| JP3205890A | ||||
| JP61145856A | ||||
| JP8204302A |
Attorney, Agent or Firm:
Kenji Okada
Katsuhiro Imashita
Katsuhiro Imashita