Title:
偏光解析法によって多孔度を測定する方法、および1つのそのような方法を実施するためのデバイス
Document Type and Number:
Japanese Patent JP5133242
Kind Code:
B2
Abstract:
The method for measuring the porosity of an element is performed by means of a measuring device comprising a measuring chamber in which the element is disposed, a solvent tank associated with an adsorption valve, and a pump associated with a desorption valve. The measuring method comprises measurement of the pressure in the chamber by means of a pressure sensor, and a cycle for measuring the porosity by ellipsometry at different predetermined pressure. During this measuring cycle, a pressure controller controls opening of the adsorption and desorption valves according to the measured pressure. The relative pressure in the chamber is successively regulated at different predetermined values, while maintaining a continuous flow of solvent in the chamber between the tank and the pump.
Inventors:
Gourban, Simon
Frederick, Feliu
Frederick, Feliu
Application Number:
JP2008511743A
Publication Date:
January 30, 2013
Filing Date:
April 28, 2006
Export Citation:
Assignee:
Comisaria Allenergy Atomic Eo Energy Alternative
International Classes:
G01N21/21; G01J4/04
Domestic Patent References:
| JP2002523773A | ||||
| JP2005009910A | ||||
| JP2004020405A | ||||
| JP9145611A | ||||
| JP2005520132A | ||||
| JP11083737A | ||||
| JP6077301A | ||||
| JP2006317442A |
Other References:
BAKLANOV M R,JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,米国,AMERICAN VACUUM SOCIETY,2000年 5月,V18 N3,P1385-1391
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Suzuki Junsei
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Suzuki Junsei