Title:
The method and membrane vacuum pump for calibration of a membrane vacuum pump
Document Type and Number:
Japanese Patent JP6154797
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for calibrating a membrane sink pump capable of avoiding defects found in the prior art and a membrane vacuum pump.SOLUTION: This invention relates to a method for calibrating a membrane vacuum pump 1 for transmitting a medium, the pump has transmitting chambers 13, 14 that can be filled with a medium and has a piston 2 within an operating chamber that can be driven in a linear direction by a vibration coil driving part, the pump has membranes 3, 4 separating the transmitting chamber from an operating chamber 15 and arranged to vibrate between the transmitting chamber and the operating chamber, has a membrane head 5 forming the transmitting chambers together with the membranes, in this case, the piston enables the membranes to be moved and the piston is formed as one that can move in a prescribed stroke. The problem can be solved by the fact that there is provided a device 10 for detecting a position of the piston 2 and/or a dead center and that a control device 17 adjusts the dead center in response to a signal detected by the device 10.
Inventors:
Armin Conrad
Sebastian Overbeck
Sven Sehngen
Peter Forwerk
Sebastian Overbeck
Sven Sehngen
Peter Forwerk
Application Number:
JP2014243343A
Publication Date:
June 28, 2017
Filing Date:
December 01, 2014
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04B45/04; F04B45/047; F04B51/00
Domestic Patent References:
| JP55012222A | ||||
| JP2005069028A | ||||
| JP49115705U | ||||
| JP2011873A | ||||
| JP2001090662A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Kiyota Eisho
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