Title:
金属酸化物ナノ薄膜の製造方法、該方法により得られたナノ薄膜及び該ナノ薄膜を有する誘電材料
Document Type and Number:
Japanese Patent JP4478767
Kind Code:
B2
Inventors:
Toyoki Kunitake
Ichinose Izumi
Yoshinori Aoki
Rie Takagi
Ichinose Izumi
Yoshinori Aoki
Rie Takagi
Application Number:
JP2003095770A
Publication Date:
June 09, 2010
Filing Date:
March 31, 2003
Export Citation:
Assignee:
RIKEN
International Classes:
B82B3/00; C01B13/14; B01J19/00; B82B1/00; H01L21/283; H01L21/316
Domestic Patent References:
| JP9241008A |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office