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Title:
レジスト用重合体、レジスト組成物、パターンが形成された基板の製造方法
Document Type and Number:
Japanese Patent JP5138199
Kind Code:
B2
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JP2000351815CROSSLINKED VINYL POLYMER, PREPARATION THEREOF AND DAMPING MATERIAL
Inventors:
Yo Momose
Masaru Nakamura
Application Number:
JP2006290491A
Publication Date:
February 06, 2013
Filing Date:
October 25, 2006
Export Citation:
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Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F20/10; C08F16/14; C08F18/04; G03F7/033; G03F7/039; H01L21/027
Domestic Patent References:
JP2001174995A
JP2002107933A
JP2004046098A
JP2006276458A
JP2007114728A



 
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