Title:
A method for producing pure water and a pure water manufacture system
Document Type and Number:
Japanese Patent JP6029948
Kind Code:
B2
Inventors:
Yonehara Takahiro
Tsugu Abe
Yonekawa Naomichi
Katsumi Yamamoto
Tsugu Abe
Yonekawa Naomichi
Katsumi Yamamoto
Application Number:
JP2012255683A
Publication Date:
November 24, 2016
Filing Date:
November 21, 2012
Export Citation:
Assignee:
Nomura Micro Science Co., Ltd.
International Classes:
C02F1/20; B01D61/04; C02F1/32; C02F1/42; C02F1/44; C02F9/00; C02F9/04; C02F9/08; C02F9/12
Domestic Patent References:
| JP10024286A | ||||
| JP2008136959A | ||||
| JP2011031227A | ||||
| JP2008173637A |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office