Title:
【発明の名称】ハイブリッド駆動装置を備えたマイクロメカニカルなリレー
Document Type and Number:
Japanese Patent JPH08506690
Kind Code:
A
Abstract:
PCT No. PCT/DE94/00152 Sec. 371 Date Aug. 17, 1995 Sec. 102(e) Date Aug. 17, 1995 PCT Filed Feb. 14, 1994 PCT Pub. No. WO94/19819 PCT Pub. Date Aug. 1, 1994A micromechanical relay is provided having a cantilevered armature (53) which is etched out from an armature substrate (52). The armature is in the form of a tongue, is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53). The piezo-layer (60) acts as a bending transducer and forms a supplemental actuator for a quick response time. When a voltage is applied to the electrodes of the armature (53), base substrate (51) and piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56). The different characteristics of the electrostatic actuator, on the one hand, and of the piezo-drive, on the other hand, are complementarily combined to provide a strong attraction force at the start of the armature movement, and a strong contact force is produced after the armature has been attracted.
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Inventors:
Gefatter, Hans-Jürgen
Kisewetter, Rotar
Simkat, Joachim
Chelk, helmut
Kisewetter, Rotar
Simkat, Joachim
Chelk, helmut
Application Number:
JP51854394A
Publication Date:
July 16, 1996
Filing Date:
February 14, 1994
Export Citation:
Assignee:
Siemens Actien Gezel Shaft
International Classes:
H01H57/00; H01H59/00; H01H1/20; H01H1/50; (IPC1-7): H01H59/00; H01H57/00
Attorney, Agent or Firm:
Toshio Yano (3 outside)