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Title:
【発明の名称】位置検出器を備えた弁及び前記弁を組み込んだマイクロポンプ
Document Type and Number:
Japanese Patent JP3111319
Kind Code:
B2
Abstract:
PCT No. PCT/EP91/01586 Sec. 371 Date Apr. 21, 1992 Sec. 102(e) Date Apr. 21, 1992 PCT Filed Aug. 21, 1991 PCT Pub. No. WO92/04569 PCT Pub. Date Mar. 19, 1992.A valve is formed from a silicon wafer (20) and has a position detector to detect by contact the position of the valve and hence reveal any malfunction. The position detector comprises a first electrical contact (54) formed on a glass support (32) mounted on the back face of the wafer (20), a second electrical contact fixed to the wafer (20) and an electrical impedance measurement circuit (resistance or capacitance according to the embodiment) between the two electrical contacts. The valve is useful in a micropump for the injection of medicaments.

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Inventors:
Fan Lintel, Harold Thi Ji
Application Number:
JP51365991A
Publication Date:
November 20, 2000
Filing Date:
August 21, 1991
Export Citation:
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Assignee:
Weston Bridge International Limited
International Classes:
F04B43/04; F15C5/00; F16K15/14; F16K37/00; F16K99/00; (IPC1-7): F16K37/00; F04B43/04; F16K15/14
Domestic Patent References:
JP3225085A
JP4501449A
Other References:
【文献】米国特許4562741(US,A)
【文献】米国特許4585209(US,A)
【文献】欧州特許出願公開339528(EP,A1)
【文献】欧州特許出願公開387439(EP,A1)
【文献】仏国特許出願公開2639085(FR,A1)
Attorney, Agent or Firm:
Masaki Yamakawa (5 outside)