Title:
【発明の名称】圧電的に作動されるマイクロバルブ
Document Type and Number:
Japanese Patent JP2000507681
Kind Code:
A
Abstract:
PCT No. PCT/EP97/06344 Sec. 371 Date May 20, 1999 Sec. 102(e) Date May 20, 1999 PCT Filed Nov. 13, 1997 PCT Pub. No. WO98/23868 PCT Pub. Date Jun. 4, 1998A microvalve has a base element provided with a passage opening, a tappet, a suspension device for guiding the tappet, and a piezoelectric actuator for actuating the tappet. The suspension device guides the tappet relative to the base element in such a way that the passage opening can be closed or opened by the tappet. The longitudinal dimensions of the piezoelectric actuator can be changed by the application of an electric voltage. Longitudinally spaced ends of the piezoelectric actuator are connected to longitudinally spaced ends of the suspension device in such a way that the suspension device provides a way for mechanical translation between the actuator and the tappet. A change in the longitudinal dimensions of the piezoelectric actuator caused by the application of an electric voltage to the piezoelectric actuator is mechanically translated by the suspension device into a movement of the tappet essentially at right angles to the longitudinal direction so that the passage opening will be opened or closed. In addition, the suspension device is secured to the base element with the aid of a hinge-like element. At least two spaced points are used to secure the suspension device to the base element.
Inventors:
Kruge Stefan
Voias Peter
Voias Peter
Application Number:
JP52421497A
Publication Date:
June 20, 2000
Filing Date:
November 13, 1997
Export Citation:
Assignee:
Frauenhofer Gesellschaft Tool Felderung del Angewanten Forschung Afao
International Classes:
F16K31/02; B81B3/00; F15C3/04; F15C5/00; F16K31/00; F16K99/00; H01L41/09; (IPC1-7): F15C3/04; F16K31/02
Attorney, Agent or Firm:
Morishita Takeichi