Title:
マイクロ波脱脂装置及びマイクロ波脱脂方法
Document Type and Number:
Japanese Patent JP5814572
Kind Code:
B2
Inventors:
Teruichi Kanda
Natsumi Sakamoto
Kenichi Watanabe
Shinichi Takahashi
Meiichi Harada
Natsumi Sakamoto
Kenichi Watanabe
Shinichi Takahashi
Meiichi Harada
Application Number:
JP2011061508A
Publication Date:
November 17, 2015
Filing Date:
March 18, 2011
Export Citation:
Assignee:
Kanto Metallurgical Industry Co., Ltd.
Micro Electronics Co., Ltd.
Micro Electronics Co., Ltd.
International Classes:
B22F3/10; C04B35/638; C04B35/64; F27B17/00; F27D11/12; F27D19/00; F27D21/00
Domestic Patent References:
JP62041769A | ||||
JP2006518445A | ||||
JP2003302166A |
Attorney, Agent or Firm:
Naoki Kimiya