Title:
機械的及び電気的機能と分離された光学的機能を有する微小電気機械デバイス
Document Type and Number:
Japanese Patent JP2010532499
Kind Code:
A
Abstract:
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
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Inventors:
Clarence Chui
William Cummings
Brian Jay Gully
Rior Cogto
Min-Ho Tan
Yeah-Jung Tan
Qi-Wai Chang
Dennis Endish
William Cummings
Brian Jay Gully
Rior Cogto
Min-Ho Tan
Yeah-Jung Tan
Qi-Wai Chang
Dennis Endish
Application Number:
JP2010515043A
Publication Date:
October 07, 2010
Filing Date:
June 24, 2008
Export Citation:
Assignee:
Qualcomm Mems Technologies Incorporated
International Classes:
G02B26/02; B81B3/00; B81C1/00; B81C99/00
Foreign References:
| WO2006036386A1 | 2006-04-06 |
Attorney, Agent or Firm:
Yasuhiko Murayama
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro
Masatake Shiga
Takashi Watanabe
Shinya Mitsuhiro