Title:
混合装置
Document Type and Number:
Japanese Patent JP5700406
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a mixing device which is capable of grasping the remaining amount of carbon dioxide in a carbon dioxide cylinder and replacing the cylinder of carbon dioxide cylinder at a suitable timing without temporarily halting processing.SOLUTION: The mixing device for mixing pure water and carbon dioxide includes: a pure water supply source; the carbon dioxide cylinder in which liquefied carbon dioxide is filled; and a mixing part for generating a mixed liquid by mixing the pure water supplied from the pure water supply source and the carbon dioxide supplied from the carbon dioxide cylinder. The mixing device includes a carbon dioxide residue detector for detecting the remaining amount of the liquefied carbon dioxide filled by the carbon dioxide cylinder.
Inventors:
Ken Arai
Application Number:
JP2010261102A
Publication Date:
April 15, 2015
Filing Date:
November 24, 2010
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B01F5/00; B01F1/00; B01F3/04; B01F3/08; B01F5/06; B01F15/02; B01F15/04
Domestic Patent References:
| JP10324502A | ||||
| JP52051085A | ||||
| JP2005006668A | ||||
| JP2003066023A | ||||
| JP2007244946A | ||||
| JP2004337846A |
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito
Kenji Ito