Title:
圧電駆動型MEMS素子およびこの圧電駆動型MEMS素子を有する移動体通信機
Document Type and Number:
Japanese Patent JP4377740
Kind Code:
B2
Abstract:
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
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Inventors:
Takashi Kawakubo
Toshihiko Nagano
Abe Kazuhide
Toshihiko Nishigaki
Toshihiko Nagano
Abe Kazuhide
Toshihiko Nishigaki
Application Number:
JP2004133736A
Publication Date:
December 02, 2009
Filing Date:
April 28, 2004
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B81B3/00; H01G5/18; H01G7/06; H01H57/00; H01L41/08; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H02N1/00; H03H9/24; H01H59/00
Domestic Patent References:
| JP2003178663A | ||||
| JP2002100276A | ||||
| JP10290036A | ||||
| JP2003008091A | ||||
| JP2003249157A |
Foreign References:
| WO2003069776A1 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki