WASHER FOR CLEAN ROOM - SHINKO ELECTRIC CO LTD

Title:

WASHER FOR CLEAN ROOM

Document Type and Number:

Japanese Patent JPH0661207

Kind Code:

A

Abstract:

PURPOSE: To provide a washer for a clean room capable of carrying out semiconductor wafers, etc., to a next step without exposing the semiconductor wafers etc. after washed to a clean room atmosphere and also keeping them for many hours.

CONSTITUTION: In a washer for a clean room in which a substrate W for an electric apparatus, received in a cassette 40, is carried in from a cassette carry-in inlet 12 of a casing 11 and washed in a specific washing step, the casing 11 is integral with means for receiving the cassette 40 passed through the last step of a washing step into a mobile airtight container 60, and purging means for gas-purging the mobile airtight container with inactive gas for a substrate, and the casing 11 has a carry-in inlet 13 and a carry-out outlet 13 for the mobile airtight container.

Inventors:

YAMASHITA TEPPEI
MURATA MASANAO
TANAKA MIKI
MORITA AKIYA
KONO HITOSHI
HAYASHI MICHIHIRO
OKUNO ATSUSHI
NAKAMURA AKIO

Application Number:

JP21154692A

Publication Date:

March 04, 1994

Filing Date:

August 07, 1992

Export Citation:

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Assignee:

SHINKO ELECTRIC CO LTD

International Classes:

H01L21/304; H01L21/677; H01L21/68; (IPC1-7): H01L21/304; H01L21/68

Attorney, Agent or Firm:

Kobayashi

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