Title:
マルチゾーンヒータ
Document Type and Number:
Japanese Patent JP7216710
Kind Code:
B2
Abstract:
A multi-zone heater includes an outer circumferential zone heater and first and second elemental wire portions. The outer circumferential zone heater is a coil that is provided in an outer circumferential zone of a ceramic substrate in the same plane as a plane in which a central zone heater is provided and that is routed throughout the outer circumferential zone in a unicursal manner from one end portion to the other end portion in the outer circumferential portion. The first elemental wire portion extends from a first terminal, passes through a central portion, is connected to the one end portion of the outer circumferential zone heater, and has a meandering shape in plan view. The second elemental wire portion extends from a second terminal, passes through the central portion, is connected to the other end portion of the outer circumferential zone heater, and has a meandering shape in plan view.
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Inventors:
Yuno Umino
Kondo Nobuyuki
Kondo Nobuyuki
Application Number:
JP2020508165A
Publication Date:
February 01, 2023
Filing Date:
March 06, 2019
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H05B3/74; H05B3/10
Domestic Patent References:
| JP2003133195A | ||||
| JP20046242A | ||||
| JP2005197074A | ||||
| JP2003272805A |
Attorney, Agent or Firm:
Patent Attorney Corporation ITEC International Patent Office