ネガ型レジスト組成物及びその用途

Title:

ネガ型レジスト組成物及びその用途

Document Type and Number:

Japanese Patent JP5767544

Kind Code:

B2

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Inventors:

Masatoshi Yoshida
Minoru Yamaguchi
Yasuhiro Matsuda

Application Number:

JP2011201598A

Publication Date:

August 19, 2015

Filing Date:

September 15, 2011

Export Citation:

Assignee:

Nippon Shokubai Co., Ltd.

International Classes:

G03F7/038; C08F20/26; C08F22/40; C08F36/02; G02B5/20

Domestic Patent References:

Foreign References:

WO2009145120A1

Attorney, Agent or Firm:

Atomi International Patent Office

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