Title:
新規化合物、レジスト組成物及びパターン形成方法
Document Type and Number:
Japanese Patent JP5580674
Kind Code:
B2
Abstract:
A salt represented by the formula (I-Pb): wherein Xpb represents a single bond or -O-, Rpb represents a single bond etc., Ypb represents a polymerizable group, Zpb represents an organic group, Xpc represents a single bond or a C1-C4 alkylene group, and Rpc represents a C1-C10 aliphatic hydrocarbon group which can have one or more substituents etc.
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Inventors:
Ichikawa Koji
Masako Sugihara
Yuko Yamashita
Masako Sugihara
Yuko Yamashita
Application Number:
JP2010155689A
Publication Date:
August 27, 2014
Filing Date:
July 08, 2010
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07C381/12; C07C53/10; C07C62/24; C07C63/08; C07D333/76; C08F20/38; C09K3/00; G03F7/004; G03F7/039
Attorney, Agent or Firm:
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