NITRIDING METHOD AND NITRIDING EQUIPMENT

Title:

NITRIDING METHOD AND NITRIDING EQUIPMENT

Document Type and Number:

Japanese Patent JP2018111884

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a nitriding method wherein: on the surface of a treatment object such as a tool or a die, a nitrogen compound layer such as iron is formed, so that problems such as surface fog, increase in surface roughness, rise in frictional coefficient, or deterioration of releasability, are prevented; and also, even in a tool or die having a slit (fine structure), the inner surface of the narrow slit can be treated uniformly.SOLUTION: Nitriding is conducted using a plasma 31 which contains nitrogen atoms, which is generated by irradiating an electron beam 29 or a microwave with gas containing nitrogen.SELECTED DRAWING: Figure 1

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Inventors:

HARA TAMIO
OSHIMA NOBUAKI

Application Number:

JP2018043161A

Publication Date:

July 19, 2018

Filing Date:

March 09, 2018

Export Citation:

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Assignee:

TOYOTA GAKUEN
PLASMA RES AND DEV LAB CO LTD

International Classes:

C23C8/26

Domestic Patent References:

JP2007314845A	2007-12-06
JPH1167491A	1999-03-09
JP2002356764A	2002-12-13
JPH11204292A	1999-07-30
JP2011052313A	2011-03-17
JP2002194527A	2002-07-10
JP2006206959A	2006-08-10
JP2011222860A	2011-11-04
JP2009021565A	2009-01-29
JP2005332838A	2005-12-02

Foreign References:

US5900126A	1999-05-04
EP0872569A1	1998-10-21

Attorney, Agent or Firm:

Nagoya International Patent Service Corporation

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