Title:
A non-contact support device and an application device
Document Type and Number:
Japanese Patent JP6043123
Kind Code:
B2
Inventors:
Kouichi Kakuda
Takuya Hirayama
Takuya Hirayama
Application Number:
JP2012182995A
Publication Date:
December 14, 2016
Filing Date:
August 22, 2012
Export Citation:
Assignee:
OILES CORPORATION
International Classes:
H01L21/677; B05C13/02; B65G51/03
Domestic Patent References:
| JP2008041989A | ||||
| JP2011176086A | ||||
| JP2006266690A | ||||
| JP2008226972A | ||||
| JP2011220631A |
Attorney, Agent or Firm:
Naoki Kimiya
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