Title:
NOZZLE AND WORKPIECE POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2017192995
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a nozzle capable of reducing the amount of deactivation of activated gas contained in liquid, and decreasing loss of electric power upon generating the activated gas.SOLUTION: A nozzle 1 according to an embodiment of the present invention comprises: a liquid flow path 12 through which liquid flows; a gas flow path 14 through which gas flows, and which is in communication with the liquid flow path 12, for delivering the gas into the liquid flow path 12; and a plasma generation mechanism 20 for generating plasma inside the gas delivered from the gas flow path 14 to the liquid flow path 12. The plasma generation mechanism 20 has: a first electrode 22 disposed being exposed to the liquid flow path 12; a second electrode 24 that is disposed not being exposed to the liquid flow path 12, and is disposed being exposed to the gas flow path 14; and a power supply 26 for applying a predetermined voltage between the first electrode 22 and the second electrode 24. The gas including the generated plasma is mixed in the liquid, as bubbles each having a predetermined diameter, then the liquid is discharged.SELECTED DRAWING: Figure 1
Inventors:
SHIBUYA KAZUTAKA
NAKAMURA YOSHIO
NAKAMURA YOSHIO
Application Number:
JP2016083322A
Publication Date:
October 26, 2017
Filing Date:
April 19, 2016
Export Citation:
Assignee:
FUJIKOSHI MACHINERY CORP
International Classes:
B24B37/00; B05B1/02; B05B7/04; B24B37/10; H01L21/304
Domestic Patent References:
| JP2014079743A | 2014-05-08 | |||
| JP2016037442A | 2016-03-22 | |||
| JP2012164559A | 2012-08-30 | |||
| JP2015186838A | 2015-10-29 | |||
| JP2008018400A | 2008-01-31 |
Foreign References:
| WO2012157034A1 | 2012-11-22 |
Attorney, Agent or Firm:
Watanuki International Patent and Trademark Office