Title:
多段式のピストン真空ポンプ及び該ポンプの運転方法
Document Type and Number:
Japanese Patent JP2004527692
Kind Code:
A
Inventors:
Rudolph Barnen
Josef Hodup
Josef Hodup
Application Number:
JP2003502370A
Publication Date:
September 09, 2004
Filing Date:
May 10, 2002
Export Citation:
Assignee:
Leybold Vakuum GmbH
International Classes:
F04B39/10; F04B25/00; F04B25/02; F04B27/02; F04B35/04; F04B37/14; F04B37/16; H02K33/16; (IPC1-7): F04B39/10; F04B27/02; F04B37/16
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel