OPERATION METHOD OF HIGH-FREQUENCY OUTPUT

Japanese Patent JP2018052795

A

PROBLEM TO BE SOLVED: To provide an operation method of a high-frequency output, which stabilizes a crucible bottom temperature to a target temperature, when an oxide single crystal is raised by a rotation Czochralski method.SOLUTION: The operation method of the high-frequency output includes a first step of operating a high-frequency output by calculating an operation amount X of the high-frequency output by a formula (1)[X=a(Y-Y)+bZ], and a second step of repeating the first step by an arbitrary control cycle T by the time when conditions of (Y-Y)=0 and Z=0 are satisfied, and a coefficient a and a coefficient b in the formula (1) are calculated by a formula (2)[ coefficient a=0.00137×(high-frequency output)], and a formula (3)[coefficient b=-0.00375×(high-frequency output)], where the operation amount of the high-frequency output is X, the target temperature of the crucible bottom is Y, the crucible bottom temperature at operation time is Y, and an increasing or decreasing amount of the crucible bottom temperature per one minute is Z.SELECTED DRAWING: Figure 1

AOKI KATSUTOSHI

JP2016194887A

April 05, 2018

September 30, 2016

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SUMITOMO METAL MINING CO

C30B15/20; C30B29/30; F27B14/20; F27D11/06

Akira Ueda
Masahiro Koizumi

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