Title:
PURGE STOCKER AND OPERATION METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2016127228
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a purge stocker which enables an operator to easily determine whether a container or a purge device causes abnormality when the abnormality occurs in a purge and thereby enables improvement of the operating efficiency.SOLUTION: A purge stocker 1 includes: purge devices 4, 4a for supplying a purge gas to a container F; a detection device 36 for detecting a state of a purge in the container F; and an inspection part 4b for inspecting the purge of the container F when the detection device 36 detects abnormality of the purge.SELECTED DRAWING: Figure 1
Inventors:
MURATA MASANAO
YAMAJI TAKASHI
YAMAJI TAKASHI
Application Number:
JP2015002134A
Publication Date:
July 11, 2016
Filing Date:
January 08, 2015
Export Citation:
Assignee:
MURATA MACHINERY LTD
International Classes:
H01L21/673; B65G1/00
Domestic Patent References:
| JP2010182747A | 2010-08-19 | |||
| JP2008159734A | 2008-07-10 |
Foreign References:
| WO2014141563A1 | 2014-09-18 |
Attorney, Agent or Firm:
Kazuya Nishi
Tomihiko Isono
Tomihiko Isono
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