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Title:
OPTICAL INTEGRATED ELEMENT, MANUFACTURING METHOD THEREOF, AND OPTICAL COMMUNICATION DEVICE
Document Type and Number:
Japanese Patent JP2017092262
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical integrated element whose alignment accuracy of an optical waveguide in the height direction is improved when an optical function element and an optical semiconductor element are integrated.SOLUTION: An optical integrated element 3 comprises: an optical semiconductor element 1 comprising a first protrusion portion 5 including an active layer 4, and a first recess portion 6 extending from a surface side to a position deeper than the active layer 4; and an optical function element 2 comprising an optical waveguide including a core layer, and a second recess portion 9 where an end surface of the core layer is exposed at a side surface. The optical semiconductor element 1 and the optical function element 2 are integrated in a state in which the bottom surface of the first recess portion 6 is in contact with the surface of the optical function element 2, and the first protrusion portion 5 goes into the second recess portion 9 and the active layer 4 is optically connected with the core layer.SELECTED DRAWING: Figure 1

Inventors:
KURAHASHI TERUO
HAYAKAWA AKINORI
UETAKE MASATO
MATSUMOTO TAKESHI
Application Number:
JP2015220905A
Publication Date:
May 25, 2017
Filing Date:
November 11, 2015
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01S5/022; G02B6/12; G02B6/42
Domestic Patent References:
JPH03205889A1991-09-09
JPH06201930A1994-07-22
JPH09304663A1997-11-28
Attorney, Agent or Firm:
Yu Sanada
Masahisa Yamamoto