Title:
Optical characteristic acquisition device, position measurement device, optical characteristic acquisition method and position measurement method
Document Type and Number:
Japanese Patent JP6359378
Kind Code:
B2
Inventors:
Kazutaka Taniguchi
Application Number:
JP2014162369A
Publication Date:
July 18, 2018
Filing Date:
August 08, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G03F9/00; G01B11/00; G03F7/20
Domestic Patent References:
| JP2010109186A | ||||
| JP2006279028A | ||||
| JP2011029431A | ||||
| JP2011124345A | ||||
| JP2015191132A | ||||
| JP2008286548A | ||||
| JP2007205929A | ||||
| JP2005327769A | ||||
| JP2013088432A |
Attorney, Agent or Firm:
Masahiro Matsusaka
Tsutomu Tanaka
Masamichi Ida
Tsutomu Tanaka
Masamichi Ida