Title:
OPTICAL DEFLECTOR, OPTICAL SCANNER, IMAGE PROJECTION DEVICE, AND IMAGE FORMING APPARATUS
Document Type and Number:
Japanese Patent JP2018013546
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an optical deflector including a piezoelectric member insusceptible to damage.SOLUTION: An optical deflector 13 comprises a mirror part 101 including a reflection surface 14, and driving parts 130a and 130b that drive the mirror part 101. The driving parts have a configuration in which a plurality of piezoelectric driving parts 131a to 131f and 132a to 132f are continued at folding parts. The piezoelectric driving parts 131a to 131f and 132a to 132f each include a support member, a piezoelectric member formed by laminating a lower electrode, a piezoelectric part, and an upper electrode on the support member, and an insulating film that covers the surface of the piezoelectric member. The lower electrode is independent for each of the plurality of piezoelectric driving parts 131a to 131f and 132a to 132f and connected to a wiring part 151 for applying voltage through a connection hole formed in the insulating film, and the upper electrodes adjacent to each other are continuously formed.SELECTED DRAWING: Figure 12
Inventors:
MORI TETSUJI
HASHIGUCHI TSUYOSHI
NAKAGAWA ATSUSHI
SUZUKI SHUICHI
HASHIGUCHI TSUYOSHI
NAKAGAWA ATSUSHI
SUZUKI SHUICHI
Application Number:
JP2016141635A
Publication Date:
January 25, 2018
Filing Date:
July 19, 2016
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
G02B26/10; B41J2/47; B81B3/00; G02B26/08; H02N2/12
Attorney, Agent or Firm:
Shuichi Kudo
Shogo Honda
Shogo Honda
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