Title:
An optical image formation device which has an oscillating interception support unit
Document Type and Number:
Japanese Patent JP6154808
Kind Code:
B2
Inventors:
Im Boon Patrick Kwan
Dick Antonius Hendricks Laro
Dick Antonius Hendricks Laro
Application Number:
JP2014517531A
Publication Date:
June 28, 2017
Filing Date:
March 05, 2012
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G03F7/20; G02B17/00
Domestic Patent References:
| JP2004343116A | ||||
| JP2005236258A | ||||
| JP2010505260A | ||||
| JP2003203860A | ||||
| JP2011530820A |
Attorney, Agent or Firm:
Kenji Sugimura
Groundwork Kenichi
Tsubouchi Shin
Groundwork Kenichi
Tsubouchi Shin