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Patent Searching and Data


Title:
光学式の干渉応用圧力センサ
Document Type and Number:
Japanese Patent JP2009505041
Kind Code:
A
Abstract:
A manufacturing method for a vacuum measuring cell provides first and second Al2O3 ceramic or sapphire housing bodies on opposite sides of an Al2O3 ceramic or sapphire membrane sealed to the bodies at its opposite peripheral edges. A reference vacuum chamber and a measuring vacuum chamber are on opposite sides of the membrane. An optical transparent window is provided in the first housing body and an optically reflective material is provided on a central region of the membrane. A lens is above the optical transparent window for optically linking to the optically reflective material on the membrane and an optical fiber outside the reference vacuum chamber and at a distance from the optical transparent window feeds light through the lens and window and in and out onto the optically reflective material on the membrane so that the level of membrane deflection is detected by a Fabry-Perot Interferometer.

Inventors:
Beruhiri, urus
Björkman, Pale
Saari, Heikki
Antila, Jarucco
Hanselman, Hans Jacob
Bust, martin
Application Number:
JP2008525357A
Publication Date:
February 05, 2009
Filing Date:
July 18, 2006
Export Citation:
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Assignee:
Inficon GmbH
International Classes:
G01L11/02; G01L21/00
Domestic Patent References:
JPS62211531A1987-09-17
JP2002500351A2002-01-08
JPS5760239A1982-04-12
JPH0634469A1994-02-08
JPH11502627A1999-03-02
Foreign References:
US4589286A1986-05-20
US6591687B12003-07-15
US20020003917A12002-01-10
US4589286A1986-05-20
US6591687B12003-07-15
US20020003917A12002-01-10
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa