Title:
OPTICAL INTERFERENCE FILTER
Document Type and Number:
Japanese Patent JP2023049021
Kind Code:
A
Abstract:
To solve the problem that a conventional optical filter introduces a defect or transmits the defect.SOLUTION: An optical interference filter comprises a substrate and a set of layers arranged on the substrate. The set of layers includes a first subset of layers which includes an aluminum nitride (AlN) material, and a second subset of layers which includes a hydrogenated silicon (Si:H) material.SELECTED DRAWING: Figure 2
Inventors:
YANG JINHUI
GRIGONIS MARIUS
GEORG J OCKENFUSS
HENDRIX KAREN DENISE
GRIGONIS MARIUS
GEORG J OCKENFUSS
HENDRIX KAREN DENISE
Application Number:
JP2022152293A
Publication Date:
April 07, 2023
Filing Date:
September 26, 2022
Export Citation:
Assignee:
VIAVI SOLUTIONS INC
International Classes:
G02B5/28
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Uehara Makoto
Mitsutsugu Sugimura
Uehara Makoto