OPTICAL SYSTEM, EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING ARTICLE

Title:

OPTICAL SYSTEM, EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING ARTICLE

Document Type and Number:

Japanese Patent JP2017215485

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide such technology advantageous for efficiently guiding light from a plurality of solid light-emitting elements to an illumination target region.SOLUTION: An optical system includes: a light source part having a plurality of solid light-emitting elements arranged at a first pitch along a first direction; an optical member having a pair of first reflection surfaces disposed to oppose to each other and spaced from each other in the first direction; and a condensing optical system disposed between the light source part and the optical member. The light source part, the condensing optical system and the optical member are disposed in such a manner that light emitting from each of the plurality of solid light-emitting elements enters an incident end of the optical member and exits from an exit end of the optical member and that respective images of the plurality of solid light-emitting elements overlap one another at the exit end.SELECTED DRAWING: Figure 9

Inventors:

MATSUMURA YUSUKE
MORI KENICHIRO

Application Number:

JP2016109641A

Publication Date:

December 07, 2017

Filing Date:

June 01, 2016

Export Citation:

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Assignee:

CANON KK

International Classes:

G03F7/20; F21S2/00; F21V8/00; G02B19/00; H04N1/036

Domestic Patent References:

JP2014002212A	2014-01-09
JP2007114603A	2007-05-10
JP2006171427A	2006-06-29
JP2015088410A	2015-05-07
JP2011039395A	2011-02-24
JP2017111287A	2017-06-22

Foreign References:

US20080037260A1

2008-02-14

Attorney, Agent or Firm:

Yasunori Otsuka
Yasuhiro Otsuka
Shiro Takayanagi
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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