Title:
光学系、投影光学系、この投影光学系を備えた露光装置、及びこの露光装置を用いたマイクロデバイスの製造方法
Document Type and Number:
Japanese Patent JPWO2003023481
Kind Code:
A
Inventors:
Yasuhiro Omura
Application Number:
JP2002008726W
Publication Date:
March 20, 2003
Filing Date:
August 29, 2002
Export Citation:
Assignee:
NIKON CORP.
International Classes:
(IPC1-7): H01L21/027; G02B13/00; G03F7/20; G03F7/22; G02B13/18; G02B17/08
Attorney, Agent or Firm:
Masatake Shiga
West Kazuya
Aoyama Masakazu
Norio Takahashi
West Kazuya
Aoyama Masakazu
Norio Takahashi