Title:
【発明の名称】配向性ホウ酸リチウム薄膜およびその製造方法
Document Type and Number:
Japanese Patent JP3157853
Kind Code:
B2
Abstract:
PURPOSE:To provide a lithium borate thin film having the C axis oriented parallel to a substrate and useful as a material for surface elastic wave devices and transverse wave high frequency transducers. CONSTITUTION:An oriented lithium borate thin film comprises the C axis of the thin film oriented in parallel to a substrate. A method for producing the thin film comprises coating a specific substrate with an alkoxide solution consisting of a lithium alkoxide, lithium borate, water, and an acid or a complexing agent and subsequently heating the coated substrate to crystallize the resulting lithium borate.
Inventors:
Hiroya Yamashita
Hiroshi Kusumoto
Hiroshi Kusumoto
Application Number:
JP14038691A
Publication Date:
April 16, 2001
Filing Date:
June 12, 1991
Export Citation:
Assignee:
Tokuyama Corporation
International Classes:
C30B29/22; H01G7/04; H01L41/18; (IPC1-7): C30B29/22
Domestic Patent References:
| JP3109296A |
Other References:
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