Title:
VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND MOVING BODY
Document Type and Number:
Japanese Patent JP2016197781
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration element capable of exerting stable vibration characteristics by reducing fluctuation of vibration characteristics due to external force such as acceleration, and to provide a vibrator, an oscillator, an electronic apparatus and a moving body.SOLUTION: A vibration element 1 includes: a vibration part 21; a thick portion 22 thicker than the vibration part 21; and a beam part 25 disposed in the vibration part 21. The thick portion 22 includes: a first thick portion 23 which is formed along a first outer edge 211 of the vibration part 21; and a second thick portion 24 which is formed along a third outer edge 213 of the vibration part 21. The beam part 25 is disposed along a fourth outer edge 214 of the vibration part 21, and is formed of an etching residue when the vibration part 21 is formed in a manner of wet etching.SELECTED DRAWING: Figure 1
Inventors:
YAMAMOTO YUSUKE
Application Number:
JP2015076036A
Publication Date:
November 24, 2016
Filing Date:
April 02, 2015
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/19
Domestic Patent References:
| JP2014171149A | 2014-09-18 | |||
| JP2014138413A | 2014-07-28 | |||
| JP2013093797A | 2013-05-16 | |||
| JP2005303825A | 2005-10-27 | |||
| JP2014209719A | 2014-11-06 |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi