Title:
振動絶縁システム及びリソグラフィ装置
Document Type and Number:
Japanese Patent JP2018538560
Kind Code:
A
Abstract:
本発明は、基部（１０）と、振動に敏感な物体に結合される結合要素（２０）と、基部と結合要素との間に配置された振動絶縁体（３０〜３４）と、結合要素又は振動絶縁体と振動に敏感な物体を包囲する保護ハウジング（４０）との間に配置された蛇腹部（５０）と、蛇腹部の山部に作用する１つ以上の別個の減衰要素と、を備えた振動絶縁システム（ＶＩＳ）に関する。【選択図】図２
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Inventors:
Van Rankbert, Alexander, Petrus, Josephus
Carp, Ingmar, August
Osteven, Ricardus, Simon, Antonius
Odeni Hoyce, Marco, Hendricus, Hermanus
Wraith, Robertas, Matisse, Geraldus
Seigel, Olaf, Johannes
Steen Hook, Alexander, Maurice
Carp, Ingmar, August
Osteven, Ricardus, Simon, Antonius
Odeni Hoyce, Marco, Hendricus, Hermanus
Wraith, Robertas, Matisse, Geraldus
Seigel, Olaf, Johannes
Steen Hook, Alexander, Maurice
Application Number:
JP2018517893A
Publication Date:
December 27, 2018
Filing Date:
October 26, 2016
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; F16F9/02; F16F9/32; F16F15/023; F16F15/04; F16J3/04; F16J15/52
Domestic Patent References:
| JP2005026264A | 2005-01-27 | |||
| JP2011058608A | 2011-03-24 | |||
| JPS5967849U | 1984-05-08 | |||
| JP2000340502A | 2000-12-08 |
Foreign References:
| US4523612A | 1985-06-18 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito