振動絶縁システム及びリソグラフィ装置

Title:

振動絶縁システム及びリソグラフィ装置

Document Type and Number:

Japanese Patent JP6617199

Kind Code:

B2

Abstract:

The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.

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Inventors:

Van Rankbert, Alexander, Petrus, Josephus
Carp, Ingmar, August
Osteven, Ricardus, Simon, Antonius
Odeni Hoyce, Marco, Hendricus, Hermanus
Wraith, Robertas, Matisse, Geraldus
Seigel, Olaf, Johannes
Steen Hook, Alexander, Maurice

Application Number:

JP2018517893A

Publication Date:

December 11, 2019

Filing Date:

October 26, 2016

Export Citation:

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Assignee:

AS M Netherlands B.V.

International Classes:

G03F7/20; F16F9/02; F16F9/32; F16F15/023; F16F15/04; F16J3/04; F16J15/52

Domestic Patent References:

JP2005026264A
JP2011058608A
JP59067849U
JP2000340502A

Foreign References:

US4523612

Attorney, Agent or Firm:

Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito

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