Title:
Vibration pieces, sensor units, electronic devices, and methods for manufacturing vibration pieces
Document Type and Number:
Japanese Patent JP6361707
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration piece capable of suppressing and adjusting leakage output, and a sensor unit using it, a manufacturing method therefor and an electronic apparatus mounted with the vibration piece or a sensor unit.SOLUTION: A vibration gyro element 11 includes: a base portion 21; a pair of driving vibration arms 22a and 22b individually extended from both end portions in a Y-axis direction of the base portion 21; and a pair of detecting vibration arms 23a and 23b. Further, adjusting vibration arms 125a and 125b individually extended from individual leading end portions of coupling portions 24a and 24b individually extended from both end portions in an X-axis direction of the base portion 21 in parallel with the driving vibration arms 22a and 22b are provided. The vibration gyro element 11 has weight portions 127a and 127b serving as wide portions at leading end sides of the individual adjusting vibration arms 125a and 125b. Adjusting electrodes 145a and 145b serving as film bodies for adjusting leakage output of the vibration gyro element 11 are provided on principal surfaces of the individual adjusting vibration arms 125a and 125b.SELECTED DRAWING: Figure 4
Inventors:
Seiichiro Ogura
Takayuki Kikuchi
Takayuki Kikuchi
Application Number:
JP2016162478A
Publication Date:
July 25, 2018
Filing Date:
August 23, 2016
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01C19/5614; G01C19/5628; H01L41/04; H01L41/09; H01L41/113
Domestic Patent References:
| JP11063999A | ||||
| JP2004279101A | ||||
| JP2006189353A | ||||
| JP2005337899A | ||||
| JP3276013A |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai