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Title:
A pad conditioner and directions for use which carried out negative pole corrosive protection
Document Type and Number:
Japanese Patent JP5972264
Kind Code:
B2
Abstract:
A cathodically-protected pad conditioner for chemical mechanical planarization includes: an abrasive member including a metallic substrate, a support carrier, and an anode affixed to the peripheral edge of the support carrier. A cathodic protection circuit is configured to provide a cathodic protection current from the anode to the abrasive member if contacted with an electrolyte solution. A method of using the cathodically-protected pad conditioner is also disclosed.

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Inventors:
Lalaia, Vincent Jay.
Rim, Boon Kiat
Application Number:
JP2013519695A
Publication Date:
August 17, 2016
Filing Date:
June 24, 2011
Export Citation:
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Assignee:
3M INNOVATIVE PROPERTIES COMPANY
International Classes:
H01L21/304; B24B37/00; B24B53/00
Domestic Patent References:
JP2001179603A
JP2007528299A
JP2008192749A
Foreign References:
US6203413
US7608173
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Yasuki Yanagi



 
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