Title:
PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2017003384
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a particle measuring device and a particle measuring method using a condensation nucleus method capable of detecting microscopic particles in sampling gas with a high detection rate even when the sampling gas flows at a large flow rate.SOLUTION: A particle measuring device comprises: a saturated vapor production device 1 which produces high temperature saturated vapor; a condensation pipe 2 where the saturated vapor produced in the saturation vapor production device 1 and sampling gas including microscopic particles is introduced thereinto and condensation particles are generated in a manner that allows vapor molecules in the saturated vapor to be condensed with the microscopic particles in the sampling gas as nuclei; and a particle measuring section 4 which measures the number of the microscopic particles by measuring the number of condensation particles generated in the condensation pipe 2. Both the saturated vapor and the sampling gas are introduced into the condensation pipe 2 in laminar flows and a mixed flow of the saturated vapor and the sampling gas in the condensation pipe 2 also forms a laminar flow.SELECTED DRAWING: Figure 1
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Inventors:
TSUJIMOTO KAZUYA
IKEDA KYOKO
FUJIWARA KAORU
IKEDA KYOKO
FUJIWARA KAORU
Application Number:
JP2015116587A
Publication Date:
January 05, 2017
Filing Date:
June 09, 2015
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01N15/14; G01N15/00; G01N15/06
Attorney, Agent or Firm:
Hiroshi Takayama