Title:
粒子製造方法および粒子製造装置
Document Type and Number:
Japanese Patent JP3974051
Kind Code:
B2
Abstract:
A particle producing apparatus includes a reaction container, an introduction portion for introducing a source gas and a reaction inhibitor generating gas into the reaction container, an inert gas introduction portion for introducing a carrier gas into the reaction container, a heater provided on the reaction container, and an exhaust portion. The growth of particles is controlled using a particle producing reaction and a reverse reaction.
Inventors:
Isao Matsui
Application Number:
JP2003037587A
Publication Date:
September 12, 2007
Filing Date:
February 17, 2003
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
B01J19/00; B01J6/00; B01J12/02; B01J23/745; B01J23/75; B01J23/755; B01J37/08; B22F9/30; C01B32/40
Domestic Patent References:
| JP6025701A | ||||
| JP2001261335A | ||||
| JP6123014A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hiroshi Horiguchi
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Hiroshi Horiguchi