Title:
A pattern formation device, an application development device, a substrate conveying method using them, and a manufacturing method of a device
Document Type and Number:
Japanese Patent JP6157573
Kind Code:
B2
Inventors:
Ryo Tanaka
Application Number:
JP2015239386A
Publication Date:
July 05, 2017
Filing Date:
December 08, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; H01L21/677
Domestic Patent References:
| JP2008153474A | ||||
| JP7176588A | ||||
| JP2008091508A | ||||
| JP2005209900A | ||||
| JP10133706A |
Foreign References:
| US20080079925 |
Attorney, Agent or Firm:
Ryoichi Takaoka
Nao Oda
Nao Oda