Title:
A pattern formation device and a pattern formation method
Document Type and Number:
Japanese Patent JP6207997
Kind Code:
B2
Abstract:
A pattern forming apparatus comprises: a first holder which holds a blanket carrying a pattern forming material on one surface in a horizontal posture with a carrying surface for the pattern forming material faced up; a second holder which holds a plate for patterning the pattern forming material or a substrate, to which a pattern is transferred, as a processing object such that the processing object is proximate to and facing the carrying surface of the blanket held on the first holder; and a push-up unit which partially pushes up an effective area in a central part of the blanket from a lower surface side of the blanket to bring the effective area into contact with the processing object held on the second holder and moves along the lower surface of the blanket to change a push-up position of the blanket.
Inventors:
Rifumi Kawagoe
Mikio Masuichi
Hiroyuki Ueno
Shoji Kazuhiro
Yayoi Shibafuji
Ueno Mika
Mikio Masuichi
Hiroyuki Ueno
Shoji Kazuhiro
Yayoi Shibafuji
Ueno Mika
Application Number:
JP2013262351A
Publication Date:
October 04, 2017
Filing Date:
December 19, 2013
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
B41F3/20; B41F17/14; H01L21/027; H05K3/12
Domestic Patent References:
| JP2010058415A | ||||
| JP2011069844A |
Foreign References:
| US5458715 |
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi
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