Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
A pattern formation device and a pattern formation method
Document Type and Number:
Japanese Patent JP6208000
Kind Code:
B2
Inventors:
Shoji Kazuhiro
Rifumi Kawagoe
Hiroyuki Ueno
Yayoi Shibafuji
Mikio Masuichi
Ueno Mika
Application Number:
JP2013265205A
Publication Date:
October 04, 2017
Filing Date:
December 24, 2013
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Screen Holdings Co., Ltd.
International Classes:
B41F3/20; B41F17/14; H01L21/027; H05K3/12
Domestic Patent References:
JP2014166746A
Foreign References:
US5458715
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi