パターン形成方法および高炭素含有樹脂組成物

Title:

パターン形成方法および高炭素含有樹脂組成物

Document Type and Number:

Japanese Patent JP5141554

Kind Code:

B2

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Inventors:

Hikaru Sugita
Norihiko Sugie
Ishida Hidemitsu
Norihiro Natsume
Masato Tanaka

Application Number:

JP2008520574A

Publication Date:

February 13, 2013

Filing Date:

June 05, 2007

Export Citation:

Assignee:

JSR CORPORATION

International Classes:

G03F7/40; C08F12/24; C08F32/08; H01L21/027

Domestic Patent References:

Attorney, Agent or Firm:

Wake Manipulation

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