Title:
パターン形成方法及びレジスト組成物
Document Type and Number:
Japanese Patent JP5533821
Kind Code:
B2
Inventors:
Jun Hatakeyama
Koji Hasegawa
Koji Hasegawa
Application Number:
JP2011184673A
Publication Date:
June 25, 2014
Filing Date:
August 26, 2011
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
G03F7/039; C08F20/38; C08F26/02; C08F28/02; G03F7/004; G03F7/038; G03F7/32; H01L21/027
Domestic Patent References:
| JP2008223000A | ||||
| JP2005097595A | ||||
| JP2005126692A | ||||
| JP2005126693A | ||||
| JP2006011372A | ||||
| JP2006011373A | ||||
| JP2006011374A |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa