Title:
Pattern height measuring device and pattern height measuring method
Document Type and Number:
Japanese Patent JP6356551
Kind Code:
B2
Inventors:
Jun Matsumoto
Yoshikawa Makoto
Yoshikawa Makoto
Application Number:
JP2014184941A
Publication Date:
July 11, 2018
Filing Date:
September 11, 2014
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01B15/00
Domestic Patent References:
| JP2012177654A | ||||
| JP2010085376A | ||||
| JP11248442A | ||||
| JP62261911A | ||||
| JP2002031520A | ||||
| JP61239107A | ||||
| JP2009211961A |
Foreign References:
| WO2004061388A2 |
Attorney, Agent or Firm:
Longhua International Patent Service Corporation
Keizo Okamoto
Keizo Okamoto