Title:
A pattern instrumentation method and a device
Document Type and Number:
Japanese Patent JP6237048
Kind Code:
B2
Inventors:
Hidemitsu Nagi
Application Number:
JP2013198562A
Publication Date:
November 29, 2017
Filing Date:
September 25, 2013
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G01B15/04
Domestic Patent References:
JP2013002872A | ||||
JP11026530A |
Foreign References:
US5578821 |
Attorney, Agent or Firm:
Patent business corporation Ogasawara patent office
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